ELECTROSTATIC CHUCK

摘要

An electrostatic chuck according to an embodiment is an electrostatic chuck for adsorbing an object. The electrostatic chuck includes a base body having a first surface that includes a bottom surface and a protruding surface part protruding from the bottom surface. The protruding surface part has a first top surface and a step surface disposed between the first top surface and the bottom surface.

主权项

1. An electrostatic chuck comprising:
a base body having a first surface comprising a bottom surface and a protruding surface part protruding from the bottom surface, wherein the protruding surface part comprises a first top surface and a step surface disposed between the first top surface and the bottom surface.