发明名称 |
Microfabricated filter and shell constructed with a permeable membrane |
摘要 |
A method of fabricating a microfabricated filter. The method includes forming a frame structure and forming a plurality of openings through the frame structure. A permeable polysilicon membrane is formed over the plurality of openings through the frame structure. At least part of the sacrificial structure is etched with an etchant wherein the etchant passes through the permeable polysilicon membrane. The permeable polycrystal silicon membrane may have a thickness of between about 0.05 micrometers and about 0.30 micrometers. |
申请公布号 |
AU3310397(A) |
申请公布日期 |
1998.01.14 |
申请号 |
AU19970033103 |
申请日期 |
1997.05.29 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, |
发明人 |
KYLE S. LEBOUITZ;ROGER T HOWE;ALBERT P PISANO |
分类号 |
B01D71/02;B01L3/00;B81B1/00;B81B7/00;B81C1/00;G01N33/49;G03F7/00 |
主分类号 |
B01D71/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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