EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME IN WHICH A DOOR LOCK MECHANISM IS CONTROLLED ON THE BASIS OF TEMPERATURE AND AN OPERATION SEQUENCE

摘要

An exposure apparatus having a maintenance door for an exposure illumination lamp includes device for detecting temperature information of the lamp, device for confirming stop of the operation sequence of the exposure apparatus and outputting the confirmation result, and device for notifying the operator of an appropriate time for exchanging the lamp on the basis of the temperature information and the confirmation result. The apparatus also has lock device for locking or unlocking the maintenance door on the basis of the temperature of the illumination lamp.