发明名称 |
Light source device and exposure equipment using the same |
摘要 |
A light source device capable of extending the life of a collector mirror and reducing running cost by protecting the collector mirror from debris that is considered harmful to a mirror coating while securing the collection solid angle and collection rate of EUV light. The light source device includes a target supply unit for supplying a material to become the target; a laser unit for generating plasma by applying a laser beam to the target; a collection optical system for collecting the extreme ultra violet light radiating from the plasma and emitting the extreme ultra violet light; and magnetic field generating unit for generating a magnetic field within the collection optical system when supplied with current so as to trap charged particles radiating from the plasma.
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申请公布号 |
US2005167618(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
US20040014961 |
申请日期 |
2004.12.20 |
申请人 |
HOSHINO HIDEO;KOMORI HIROSHI;ENDO AKIRA |
发明人 |
HOSHINO HIDEO;KOMORI HIROSHI;ENDO AKIRA |
分类号 |
G21K5/00;G03F7/20;G21K5/02;G21K5/08;H01L21/027;H05G2/00;H05H1/24;(IPC1-7):G01J1/00 |
主分类号 |
G21K5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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