| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing tool, a polishing device and a polishing method for forming a desired polished surface even if the polished surface is a convex surface. SOLUTION: The polishing tool 1 has a polishing part 11 provided with an elastic sheet 111, and an elastic sheet mounting part 12 to which the elastic sheet 111 of the polishing part 11 is mounted. A height dimension of a fluid filling recessed part 122D of a mounting part body 122 of the elastic sheet mounting part 12, i.e., a height dimension H1 from a bottom face part 122A to the upper end part of a side face part 122B is such a height dimension that a dome-like part 111A does not abut on the bottom face part 122A of the fluid filling recessed part 122D when a convex lens L is pressed to the dome-like part 111A of the elastic sheet 111. COPYRIGHT: (C)2005,JPO&NCIPI
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