发明名称 ALIGN APPARATUS OF MASK AND ALIGN METHOD OF THE SAME
摘要 An apparatus and a method for aligning a mask are provided to prevent thermal damage to a device due to irradiating laser at the other area except a glass frit by preventing the slide of a mask. An apparatus for aligning a mask includes a body(210), a transferring unit(230), a substrate stage(240), and a mask absorbing unit(260). The transferring unit(230) is installed on the body(210), and brings in/out a substrate by rotating and moving up/down. The substrate stage(240) is installed on the transferring unit(230), and fixes and supports the substrate. The mask absorbing unit(260) is installed at the edge of the upper surface of the substrate stage(240), and absorbs the mask.
申请公布号 KR100742385(B1) 申请公布日期 2007.07.18
申请号 KR20060007027 申请日期 2006.01.23
申请人 SAMSUNG SDI CO., LTD. 发明人 CHOI, DONG SOO;PARK, JIN WOO
分类号 H05B33/10 主分类号 H05B33/10
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