| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining device and a machining method therefor for forming a nano structure having a predetermined ultra-fine pattern on a workpiece, and evaluating the machined shape of the nano structure in a short period of time. <P>SOLUTION: The laser beam machining device includes a rotating mechanism 101 for placing and rotating the workpiece 102, and a moving mechanism movable straight in the radial direction of the workpiece 102, and a beam spot formed on the surface of the workpiece 102 by laser beams is moved while depicting the locus. By adjusting the intensity distribution of the laser beams of the beam spot, the ultra-fine pattern to be formed on the workpiece 102 is adjusted so as to be an intended shape. In order to set parameter values during the adjustment, the formed ultra-fine pattern is evaluated by evaluating the reflected light from the ultra-fine pattern. <P>COPYRIGHT: (C)2007,JPO&INPIT |
