AN OPTICAL MEASUREMENT SYSTEM WITH SIMULTANEOUS MULTIPLE WAVELENGTHS, MULTIPLE ANGLES OF INCIDENCE AND ANGLES OF AZIMUTH

摘要

The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.