| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device which is capable of carrying even a disk-shaped tabular material unit where a disk-shaped tabular material is off-center, in alignment with a chuck table as a destination of carrying.SOLUTION: A carrying device 2 which carries a disk-shaped tabular material unit where a disk-shaped tabular material is stuck to an annular frame F, to a chuck table as a destination includes a sucking, holding, and aligning mechanism for sucking and holding the disk-shaped tabular material unit and aligning it with the chuck table and a moving mechanism for moving the sucking, holding, and aligning mechanism. The sucking, holding, and aligning mechanism includes: a sucking and holding part 46 which sucks and holds the annular frame F; means which positions the center of the disk-shaped tabular material unit to the center of the chuck table by moving a plurality of claws 30 acting on an outer peripheral side surface of the disk-shaped tabular material of the disk-shaped tabular material unit, between a standby position and an action position close to each other in a radial direction; and sucking and holding part positioning means 18 which positions the sucking and holding part 46 between a sucking and holding position and a retreat position above it. |
