| 摘要 |
PROBLEM TO BE SOLVED: To realize a wafer chamfering device capable of inducing a detection signal of an AE sensor provided on a rotation grindstone side to a stationary side in a non-contact manner, and determining a contact state or a surface state of a grindstone by signal processing of the induced signal.SOLUTION: A wafer chamfering device has: a wafer table 10 holding and rotating a wafer W; and a grindstone rotary mechanism holding and rotating a chamfering grindstone 20. The grindstone rotary mechanism has a rotary unit and a stationary unit. The rotary unit has an AE sensor 34 and transmission means 31. The stationary unit has reception means 41 communicating with the transmission means, and a signal processing circuit 65. The transmission means detects a signal of the AE sensor. The signal processing circuit has an amplifier 63, an AD converter 64, and a digital processing circuit, performs filtering processing for removing a low-frequency component, and further performs processing for extracting signal change corresponding to a rotation cycle of the rotary unit. |
