| 发明名称 |
HEATER ABNORMALITY DETECTING APPARATUS, PROCESSING LIQUID SUPPLYING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM |
| 摘要 |
A heater abnormality detecting apparatus is arranged to detect an abnormality of a heater, the heater contacting a processing liquid to heat the processing liquid and having a heating element made of metal and a coating made of resin and covering a periphery of the heating element, and the apparatus includes a grounding unit grounding the processing liquid in contact with the heater, a power supplying unit supplying power to the heating element to make the heating element generate heat, an electric current measuring unit measuring an electric current flowing through the heating element, and a tear formation detecting unit detecting formation of a tear in the coating based on a magnitude of the electric current detected by the electric current measuring unit. |
| 申请公布号 |
US2016251754(A1) |
申请公布日期 |
2016.09.01 |
| 申请号 |
US201615052028 |
申请日期 |
2016.02.24 |
| 申请人 |
SCREEN Holdings Co., Ltd. |
发明人 |
NAKASHIMA Akihiro;SAWASHIMA Jun;KOBAYASHI Kenji |
| 分类号 |
C23C16/02;G01N27/00 |
主分类号 |
C23C16/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A heater abnormality detecting apparatus arranged to detect an abnormality of a heater, the heater contacting a processing liquid to heat the processing liquid and having a heating element made of metal and a coating made of resin and covering a periphery of the heating element, the apparatus comprising:
a grounding unit grounding the processing liquid in contact with the heater; a power supplying unit supplying power to the heating element to make the heating element generate heat; an electric current measuring unit measuring an electric current flowing through the heating element; and a tear formation detecting unit detecting formation of a tear in the coating based on a magnitude of the electric current detected by the electric current measuring unit. |
| 地址 |
Kyoto JP |
