| 发明名称 |
FILM FORMING APPARATUS |
| 摘要 |
A film forming apparatus according to an embodiment comprises a film forming chamber. A first pipe part is connected to the film forming chamber and leads a discharge gas out of the film forming chamber. The first pipe part has a first opening area in a cross-section perpendicular to a moving direction of the discharge gas. A liquid discharger discharges a part of the discharge gas liquefied in the first pipe part. A second pipe part is provided between the first pipe part and the liquid discharger and has a second opening area smaller than the first opening area in a cross-section perpendicular to a moving direction of the discharge gas. |
| 申请公布号 |
US2016348238(A1) |
申请公布日期 |
2016.12.01 |
| 申请号 |
US201615012003 |
申请日期 |
2016.02.01 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Nakata Rempei;Ootsuka Kenichi;Kuroda Yuuichi;Hirano Masaki;Miyashita Naoto;Miki Tsutomu |
| 分类号 |
C23C16/44;H01L21/02;C30B29/06;C23C16/24;C30B25/14 |
主分类号 |
C23C16/44 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A film forming apparatus comprising:
a film forming chamber; a first pipe part connected to the film forming chamber and leading a discharge gas out of the film forming chamber, the first pipe part having a first opening area in a cross-section perpendicular to a discharging direction of the discharge gas; a liquid discharger discharging a part of the discharge gas liquefied in the first pipe part; and a second pipe part provided between the first pipe part and the liquid discharger and having a second opening area smaller than the first opening area in a cross-section perpendicular to a discharging direction of the discharge gas. |
| 地址 |
Tokyo JP |
