Anordning og fremgangsmåte for utförelse av tynnfilmsjikt-tykkelsesmetrologi med höy romopplösning,申请号NO19940001768-传众专利搜索

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发明名称	Anordning og fremgangsmåte for utförelse av tynnfilmsjikt-tykkelsesmetrologi med höy romopplösning
摘要
申请公布号	NO941768(D0)	申请公布日期	1994.05.11
申请号	NO19940001768	申请日期	1994.05.11
申请人	HUGHES AIRCRAFT CO	发明人	MUMOLA, PETER B.
分类号	G01B11/06;G02B3/00;H01L21/02;H01L27/12;(IPC1-7):G01B	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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