摘要 |
PROBLEM TO BE SOLVED: To provide an extremely thermally stable diamond ultraviolet photosensor having the photosensitivity to ultraviolet light having a wavelength of 260 nm or below. SOLUTION: The feature of a photoconductive sensor element is employed while avoiding complication of the element structure, and the carbide compound of a high melting point metal (TiC, ZrC, HfC, VC, NbC, TaC, CrC, MoC, and WC) having a high mechanical strength is used for a rectifying electrode and/or an ohmic electrode. COPYRIGHT: (C)2006,JPO&NCIPI
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