| 摘要 |
An aberration correction element includes a support substrate, a plurality of piezoelectric elements disposed on the support substrate, each of which is made up of a piezoelectric member and electrodes disposed at the upper and the lower sides of the piezoelectric member, and reflection portion disposed at the upper portion of the plurality of piezoelectric elements so as to reflect incident light. The reflection portion is a set of rectangular mirror segments of the same number as the number of the piezoelectric elements. The individual mirror segments are independent of each other and are bonded to upper sides of the individual piezoelectric elements, respectively.
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