| 摘要 |
The present invention relates to a surface polishing apparatus. More particularly, the present invention relates to a surface polishing apparatus for polishing components such as the susceptor of a substrate processing device and polishing the surface. The present invention relates to a surface polishing apparatus for polishing the surface of an object (20) to be surface-polished, mounted on a surface polishing object support part (10) by horizontal shift. The surface polishing apparatus includes a plurality of polishing modules (100) for polishing the surface of the object (20) to be surface-polished; a support part (200) for supporting the polishing modules (100); and a horizontal shift part which horizontally moves the support part (200) on the surface of the object (20) to be surface-polished, mounted on the surface polishing object support part (10). So, the surface polishing process can be efficiently carried out. |
