| 摘要 |
An objective of the present invention is to provide a line heater. The line heater includes: an outer sleeve (10) having an inlet port and an outlet port (14) positioned at both ends thereof; a heating element (20) provided on an outer circumference of the outer sleeve (10); and a cleaning core sleeve (30) which is embedded in the outer sleeve (10), disposed between the inlet port and the outlet port (14), and composed of a quartz material to allow a reaction gas introduced from the inlet port to be purified while passing through the inside of the cleaning core sleeve. The cleanliness of the reaction gas (nitride gas) which is supplied into a semiconductor (wafer, etc.) is satisfactorily achieved, so the quality of the semiconductor can be improved. Also, since the heat of the heater relatively quickly ascends and is smoothly supplied, the semiconductor work process time can be shortened, thereby enhancing the productivity. |
