CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATING METHOD USING THE SAME AND IMAGE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To enable achievement of images of excellent visibility by removing noise components from a minute secondary charged particle detection signal from a minute pattern in a charged particle beam device.SOLUTION: A charged particle beam device includes a charged particle optical system for irradiating the surface of a sample with a converged charged particle beam for scanning, a detector for detecting secondary charged particles occurring from a sample to which the charged particle beam is applied by charged particle optical system, an image generator for generating an image of the sample upon reception of a detection signal of the detector, an image processor for processing the image generated by the image generator, and a display unit for displaying a processing result of the image processor. The image generator has a pulse count type signal processor for creating accumulative histogram information of a pulse signal component out of the detection signal of the detection unit, setting a threshold value for pulse signal detection by using the created accumulative histogram information, and outputting a detection signal larger than the set threshold value as a pulse signal.SELECTED DRAWING: Figure 2