| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspection method and device capable of continuously inspecting a plurality of work, without being affected by heat generation due to adiabatic compression.SOLUTION: By closing an exhaust valve 34 and opening first open/close valve 31, a second open/close valve 32, and a third open/close valve 33, pressurized gas is introduced from a compression air source 3 to pressurize a first space 51, a second space 52, and a third space 53 including work W on both sides of a differential pressure sensor 26, and then the first open/close valve 31 is closed to keep the first space 51 in a sealing state. The work W is exchanged while the second open/close valve 32 is closed to seal the second space 52, and the leak inspection of the work W after the exchange is performed by pressurizing the third space 53 to be the target pressure again and opening the second open/close valve 32 to communicate the third space 53 to the second space.SELECTED DRAWING: Figure 2 |
