INSPECTION DEVICE, INSPECTION METHOD, PROGRAM, AND STORAGE MEDIA

摘要

PROBLEM TO BE SOLVED: To provide an inspection device capable of inspecting the defect of a pattern more easily.SOLUTION: An inspection device detects the defect of a pattern by binarizing the photographic image of the pattern of a test object to extract the pattern and comparing a feature quantity calculated relative to the pattern with the feature quantity obtained in advance relative to a standard pattern. The inspection device calculates an area and a barycentric coordinate for each separated pattern section from each other included in the pattern as a feature quantity to compare these with a value obtained in advance regarding the standard pattern.SELECTED DRAWING: Figure 6