| 发明名称 |
SUBSTRATE PROCESSING APPARATUS |
| 摘要 |
A space needed to transfer a substrate container is decreased. A substrate processing apparatus includes a locating part where a substrate container accommodating a substrate is located; a driving unit configured to drive the locating part vertically; a transfer robot configured to transfer the substrate container; and a controller configured to control the driving unit and the transfer robot to move the locating part downward after the transfer robot moves to under the locating part to transfer the substrate container from the locating part to the transfer robot. |
| 申请公布号 |
US2016379858(A1) |
申请公布日期 |
2016.12.29 |
| 申请号 |
US201615263478 |
申请日期 |
2016.09.13 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC. |
发明人 |
NOGAMI Takashi;TANIYAMA Tomoshi;YOSHIOKA Kazuma |
| 分类号 |
H01L21/67;H01L21/677 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate processing apparatus comprising:
a locating part where a substrate container accommodating a substrate is located; a driving unit configured to drive the locating part vertically; a transfer robot configured to transfer the substrate container; and a controller configured to control the driving unit and the transfer robot to move the locating part downward after the transfer robot moves to under the locating part to transfer the substrate container from the locating part to the transfer robot. |
| 地址 |
Tokyo JP |
