| 发明名称 |
Vacuum Compatible LED Substrate Heater |
| 摘要 |
A system for heating substrates within a chamber, which may be maintained at vacuum conditions, is disclosed. The LED substrate heater comprises a base having a recessed portion surrounded by sidewalls. A plurality of light emitting diodes (LEDs) are disposed within the recessed portion. The LEDs may be GaN or GaP LEDs, which emit light at a wavelength which is readily absorbed by silicon or a coating on the silicon, thus efficiently and quickly heating the substrate. A transparent window is disposed over the recessed portion, forming a sealed enclosure in which the LEDs are disposed. A sealing gasket may be disposed between the sidewalls and the window. |
| 申请公布号 |
US2016379854(A1) |
申请公布日期 |
2016.12.29 |
| 申请号 |
US201514753991 |
申请日期 |
2015.06.29 |
| 申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Vopat Robert Brent;Wyka Gary E.;Blahnik David;Schaller Jason M.;Weaver William T. |
| 分类号 |
H01L21/67;H05B3/00 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus comprising:
a sealed enclosure containing an electrical circuit comprising a plurality of LEDs, wherein a top surface of the sealed enclosure comprises a window that is transparent at a wavelength emitted by the plurality of LEDs. |
| 地址 |
Gloucester MA US |
