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发明名称
摘要
申请公布号
JP3567937(B2)
申请公布日期
2004.09.22
申请号
JP19920359158
申请日期
1992.12.26
申请人
发明人
分类号
H01L21/20;H01L21/265;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L21/336
主分类号
H01L21/20
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代理人
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