| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron tube capable of improving light detection sensitivity while securing response speed. <P>SOLUTION: The electron tube 1 is provided with a housing 2 of which inside is maintained in vacuum, a photoelectric surface 10 formed on the vacuum side of an input surface plate 3 of the housing 2, a semiconductor element 11 which is installed so as to be opposed to the photoelectric surface 10 in the housing 2 and converts electrons emitted from the photoelectric surface 10 into an electric signal, and a plurality of electrodes which are provided at prescribed spacings between the photoelectric surface 10 and the semiconductor element 11 along the inner wall of the housing 2 electrically independently of the photoelectric surface 10 and have an opening part to pass the electrons. A positive voltage to the photoelectric surface 10 is impressed to an intermediate electrode 6a arranged at the nearest location to the photoelectric surface 10 out of the plurality of electrodes, and a voltage same as or lower than the voltage impressed on the intermediate electrode 6a is impressed to an intermediate electrode 6b arranged between the intermediate electrode 6a and the semiconductor element 11 out of the plurality of electrodes. <P>COPYRIGHT: (C)2007,JPO&INPIT |
