| 发明名称 |
SYSTEM AND METHOD FOR TRANSPORT |
| 摘要 |
A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source. |
| 申请公布号 |
WO2007127007(A3) |
申请公布日期 |
2008.07.17 |
| 申请号 |
WO2007US07850 |
申请日期 |
2007.03.29 |
| 申请人 |
FIRST SOLAR, INC.;POWELL, RICKY, CHARLES |
发明人 |
POWELL, RICKY, CHARLES |
| 分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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