发明名称 THIN FILM TRANSISTOR HAVING N-TYPE AND P-TYPE CIS THIN FILMS AND METHOD OF MANUFACTURING THE SAME
摘要 Provided is a thin film transistor (TFT) which uses CIS (CuInSe<SUB>2</SUB>), including Se, which is a chalcogen-based material, and can provide a rectifying function, and electric and optical switching functions of a diode. The TFT according to the present invention includes, a substrate, a gate electrode formed on a portion of the substrate, an insulating layer covering the substrate and a gate electrode, a plurality of CIS (CuInSe<SUB>2</SUB>) films formed on the insulating layer so as to cover the region where the gate electrode is formed; and source/drain regions separated from each other so as to comprise a trench exposing a portion of a surface of the CIS films.
申请公布号 US2008217610(A1) 申请公布日期 2008.09.11
申请号 US20080027929 申请日期 2008.02.07
申请人 ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LEE SANG SU;SONG KIBONG;SUH JEONG DAE;KIM KEONGAM;CHO DOO-HEE
分类号 H01L29/267;H01L21/06 主分类号 H01L29/267
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