ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

An illumination optical system for illuminating an irradiated plane (M) with illumination light provided from a light source (1) includes a spatial light modulator (S1), which is arranged in an optical path of the illumination optical system and forms a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position, and a diffuser (4), which is arranged at an incidence side of the spatial light modulator through which the illumination light enters.