| 摘要 |
The present invention relates to a device to measure a surface shape using an asymmetrical interferometer which measures a surface shape of a large area measuring object, and realizes a slim and small interferometer. More specifically, the device to measure the surface shape using the asymmetrical interferometer, comprises: a light output unit which outputs a light source with a wide wavelength; an optical coupler which receives the light source with a wide wavelength outputted from the light output unit to distribute in a form of two point light sources, outputting the point light sources; first and second optical fibers which transfer the point light sources outputted from the optical coupler, and arranged to face each other; a first collimator lens installed to face an end part of the first optical fiber, receiving a light source diffused by output from the first optical fiber to output as parallel light; a second collimator lens installed to face an end part of the second optical fiber, receiving a light source diffused by output from the second optical fiber to output as parallel light; a light path changing unit disposed between the first collimator lens and the second collimator lens, transfers the parallel light passing through the first collimator lens to a surface of a measuring object disposed on a vertical lower part, and transfers the parallel light passing through the second collimator lens to a vertical upper part; and an imaging unit disposed on an upper part of the light path changing unit, obtaining measured light reflected from a surface of the measuring object, and an interference pattern generated by interference of reference light transferred to an upper part from the light path changing unit. |
