发明名称 |
SUBSTRATE SUPPORT WITH MULTIPLE HEATING ZONES |
摘要 |
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support may include a body having a support surface; and a first heater disposed within the body and having a first heating coil and multiple heating zones, wherein a pitch of windings of the first heating coil vary among the multiple heating zones to define a predetermined heating ratio between the multiple heating zones. |
申请公布号 |
WO2016109008(A1) |
申请公布日期 |
2016.07.07 |
申请号 |
WO2015US56934 |
申请日期 |
2015.10.22 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
MATSUSHITA, TOMOHARU;RAVI, JALLEPALLY;TSAI, CHENG-HSIUNG;KAMATH, ARAVIND;YUAN, XIAOXIONG;KOPPA, MANJUNATHA |
分类号 |
H01L21/683;H01L21/205;H01L21/324 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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