发明名称 蒸着マスクの製造方法
摘要 A production method for a deposition mask is provided. The production method includes the steps of: forming a mask member having a structure in which a thin-board magnetic metal member having a through hole and a resin film contact tightly with each other; forming a mark that has a specified depth by irradiating a part of the film through the through hole of the mask member with laser beams; and forming an opening pattern that penetrates the film by irradiating a predetermined position with laser beams, using the mark as a reference.
申请公布号 JP5958824(B2) 申请公布日期 2016.08.02
申请号 JP20120250974 申请日期 2012.11.15
申请人 株式会社ブイ・テクノロジー 发明人 水村 通伸
分类号 C23C14/04 主分类号 C23C14/04
代理机构 代理人
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