MEMS Method and Structure

摘要

MEMS structures and methods utilizing a locker film are provided. In an embodiment a locker film is utilized to hold and support a moveable mass region during the release of the moveable mass region from a surrounding substrate. By providing additional support during the release of the moveable mass, the locker film can reduce the amount of undesired movement that can occur during the release of the moveable mass, and preventing undesired etching of the sidewalls of the moveable mass.

主权项

1. A microelectromechanical structure comprising:
a moveable mass separated from a support region, the moveable mass being moveable relative to a support region; a first support film located on the moveable mass, the first support film having a first edge aligned with an edge of the moveable mass; and a second support film located on the support region, the second support film having a second edge aligned with an edge of the support region, wherein the first support film and the second support film comprise a same material.