| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromechanical conversion element that has excellent electromechanical conversion characteristics.SOLUTION: An electromechanical conversion element comprises: a first electrode that has a metal layer formed on a ground layer, and a conductive oxide layer formed on a part of the metal layer; an electromechanical conversion film formed on the conductive oxide layer; and a second electrode formed on at least a part of the electromechanical conversion film. In the first electrode, a difference between a height from the ground in an area not covered with the electromechanical conversion film and a height from the ground on a boundary face between the metal layer and the conductive oxide layer is within 5 nm. |
