SOUND DETECTING MECHANISM AND PROCESS FOR MANUFACTURING THE SAME

摘要

A sound detecting mechanism in which strain of a diaphragm is suppressed while forming the diaphragm to a required thickness. The sound detecting mechanism has a pair of electrodes arranged on a substrate A to form a capacitor, wherein one electrode of the pain of electrodes is a back electrode C having a through hole Ca corresponding to an acoustic hole and the other electrode is a diaphragm B. A silicon nitride film (303) is provided on the base side of the substrate A with reference to a film body as the diaphragm B being formed on the substrate A.