发明名称 Method for reforming color filter array of a CMOS image sensor
摘要 A method is provided for reforming a color filter array of a CMOS image sensor, wherein the method includes exposing the first cap oxide layer by removing the first micro-lens, the first cap oxide layer by removing the first micro-lens, the first OCM pattern and the first color filter array; removing the exposed first cap oxide layer; forming a second cap oxide layer on an entire surface of the semiconductor substrate; forming a second color filter array on the second cap oxide layer in correspondence with the unit pixel array region; forming a second OCM pattern on the second color filter array; exposing the metal pad by selectively etching the second cap oxide layer; and forming a second micro-lens on the second OCM pattern.
申请公布号 US2006126005(A1) 申请公布日期 2006.06.15
申请号 US20050302388 申请日期 2005.12.14
申请人 CHA DONG K 发明人 CHA DONG K.
分类号 G02F1/13 主分类号 G02F1/13
代理机构 代理人
主权项
地址