METHODS AND SYSTEMS FOR USING ELECTRICAL INFORMATION FOR A DEVICE BEING FABRICATED ON A WAFER TO PERFORM ONE OR MORE DEFECT-RELATED FUNCTIONS

摘要

Various methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions are provided. One computer-implemented method includes using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions. The one or more defect-related functions include one or more post-mask, defect-related functions.