Method for determining stress in semiconductor wafers with thin dielectric layers,申请号PL20100391655-传众专利搜索

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发明名称	Method for determining stress in semiconductor wafers with thin dielectric layers
摘要
申请公布号	PL391655(A1)	申请公布日期	2012.01.02
申请号	PL20100391655	申请日期	2010.06.28
申请人	INSTYTUT TECHNOLOGII ELEKTRONOWEJ	发明人	BOROWICZ LECH;BOROWICZ PAWE&LSTROK,;LATEK MARIUSZ
分类号	G01L1/00;G01L1/24;G01L1/25;G01N21/63;G01N21/65	主分类号	G01L1/00
代理机构		代理人
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