| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage container which includes on-off valves at places capable of accepting a plurality of purge devices having different specifications from each other despite an extremely simple constitution.SOLUTION: A substrate storage container comprises on-off valves for substituting a gas in a container body via a through hole. Each on-off valve includes: a housing on which an air vent for passing the gas is formed; a filter arranged to block the air vent; and a check valve arranged in the air vent. The housing includes: a first housing located on the side of being attached to the container body; and a second housing which is located on the side of supply and discharge of the gas and eccentric with respect to the first housing. The air vent is formed substantially at a position of a central axis of the second housing and formed at a position displaced from a central axis of the first housing. |
