发明名称 |
IR PLANAR ANTENNA-COUPLED METAL-INSULATOR-METAL RECTIFIER |
摘要 |
A planar fixed area thin film antenna-coupled metal-insulator-metal (MIM) rectifier of arbitray metal with a native nickel oxide insulator. Devices can be designed for millimeter wave, IR, NIR and visible wavelengths. |
申请公布号 |
US2016233371(A1) |
申请公布日期 |
2016.08.11 |
申请号 |
US201514845376 |
申请日期 |
2015.09.04 |
申请人 |
AMI Research & Development, LLC |
发明人 |
Apostolos John T.;Mouyos William;Bodan Patricia;Feng Milton;McMahon Benjamin |
分类号 |
H01L31/18;H01L31/09 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
1. A method for fabricating a metal-insulator-metal diode comprising:
depositing a bottom metal layer; forming a native oxide on the metal depositing an insulation layer on the bottom oxidized metal layer; forming a conductive post disposed within and exposed above the insulator layer; and depositing a top metal layer. |
地址 |
Windham NH US |