发明名称 METHOD AND SYSTEM FOR FORMING A PATTERNED METAL FILM ON A SUBSTRATE
摘要 A method and system for forming a thin patterned metal film on a substrate are presented. The method includes applying an ink composition on a pre-treated surface of the substrate, wherein the ink composition includes at least metal cations; and exposing at least the applied ink composition on the substrate to a low-energy plasma, wherein the low-energy plasma is operated according to a first set of exposure parameters.
申请公布号 US2016258048(A1) 申请公布日期 2016.09.08
申请号 US201615135094 申请日期 2016.04.21
申请人 OrelTech Ltd. 发明人 ZAMOSHCHIK Natalia
分类号 C23C4/134;C23C4/02 主分类号 C23C4/134
代理机构 代理人
主权项 1. A method for forming a thin patterned metal film on a substrate, comprising: applying an ink composition on a pre-treated surface of the substrate, wherein the ink composition includes at least metal cations; and exposing at least the applied ink composition on the substrate to a low-energy plasma, wherein the low-energy plasma is operated according to a first set of exposure parameters.
地址 Rehovot IL