Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method Of Fabricating Arrays Of Stacked Parallel Plate Waveguides

摘要

A method for fabricating crystalline dielectric material on top of metal layers to produce an apparatus for non-mechanical steering of an input laser beam is provided. The apparatus may include a plurality of stacked parallel dielectric waveguides, each waveguide of which is fabricated by separating layers of dielectric material from a donor wafer and bonding the separated layers of dielectric material to a receiving wafer. A plurality of voltages is applied across the stacked parallel dielectric waveguides. Each of the stacked parallel dielectric waveguides is electrically phase modulated to deflect an output beam in a predictable manner.

主权项

1. A method for fabricating crystalline dielectric material on top of metal layers comprising:
separating layers of dielectric material from a donor wafer; and bonding the separated layers of dielectric material to a receiving wafer.