发明名称 |
Silicon polymers, methods of polymerizing silicon compounds, and methods of forming thin films from such silicon polymers |
摘要 |
Compositions and methods for controlled polymerization and/or oligomerization of hydrosilanes compounds including those of the general formulae SinH2n and SinH2n+2 as well as alkyl- and arylsilanes, to produce soluble silicon polymers as a precursor to silicon films having low carbon content.
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申请公布号 |
US8092867(B2) |
申请公布日期 |
2012.01.10 |
申请号 |
US20070867587 |
申请日期 |
2007.10.04 |
申请人 |
KARSHTEDT DMITRY;ROCKENBERGER JOERG;ZUERCHER FABIO;RIDLEY BRENT;SCHER ERIK;KOVIO, INC. |
发明人 |
KARSHTEDT DMITRY;ROCKENBERGER JOERG;ZUERCHER FABIO;RIDLEY BRENT;SCHER ERIK |
分类号 |
B05D3/06;C07F7/02;C07F7/30 |
主分类号 |
B05D3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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