Spatial Light Modulator Using an Integrated Circuit Actuator and Method of Making and Using Same

摘要

A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can be made from piezoelectric materials. An electrode array is coupled to opposite walls of each of the actuator elements in an electrode array. Each array of electrodes can have one or more electrode sections. The array of reflective devices forms the SLM.