| 摘要 |
PROBLEM TO BE SOLVED: To provide a SQUID that can be minutely produced by an FIB device, and a method of manufacturing the same.SOLUTION: A superconductive quantum interference device (SQUID) in which a ring wiring route 100 by a superconductive wiring having tungsten as a main component is formed by an FIB-CVD method, and the superconductive wiring is then constricted by a FIB method to provide Josephson junctions 120A, 120B, and a method of manufacturing the same are provided. When a superconductive transition material adheres to either one of locations on the surface 72 of a base substance 70 where a magnetic measurement action is hampered, it is removed by the FIB method.SELECTED DRAWING: Figure 1 |
