发明名称 |
COPOLYMER FORMULATION FOR INDUCTIVE SELF ORGANIZATION, MANUFACTURING METHOD THEREFOR AND ARTICLE CONTAINING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a composition easily achieving alignment between domains in formulation of a copolymer for inductive self organization and of which a range of the polymer is not strictly controlled.SOLUTION: There is provided a method including arranging a composition on a substrate, where the composition contains a block copolymer containing a first polymer and a second polymer, where the first polymer and the second polymer are different each other and the block copolymer forms a phase separation structure, and an addition polymer containing a reactive part operable for reacting with the substrate when arranged and containing a homopolymer chemically and structurally same as one of polymer in the block polymer or a random copolymer preferentially interacting with one of a block of the block copolymer, a solvent and annealing the composition.SELECTED DRAWING: Figure 2 |
申请公布号 |
JP2016148024(A) |
申请公布日期 |
2016.08.18 |
申请号 |
JP20150241149 |
申请日期 |
2015.12.10 |
申请人 |
ROHM & HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC |
发明人 |
PHILLIP D HUSTAD;PETER TOREFONAS III;CHANG SHIH-WEI |
分类号 |
C09D153/00;B05D3/00;B05D7/24;C08F257/02;C09D153/02;H01L21/027 |
主分类号 |
C09D153/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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