| 主权项 |
1. A measurement apparatus for measuring a shape of an object to be measured, the apparatus comprising:
an illumination unit configured to illuminate the object to be measured with first light in a first wavelength region having a pattern shape, and illuminate the object to be measured with second light in a second wavelength region different from the first wavelength region at the same time; an image sensing unit including an imaging optical system having an axial chromatic aberration between the first wavelength region and the second wavelength region, a wavelength separation filter configured to separate an image in the first wavelength region of the object to be measured and an image in the second wavelength region of the object to be measured, and an image sensor configured to sense the image in the first wavelength region and the image in the second wavelength region; and a processor configured to process the first image in the first wavelength region and the second image in the second wavelength region of the object to be measured, which are output from the image sensing unit, wherein the processor executes deconvolution processing for one of the first image and the second image, which has a large amount of defocusing, and obtains information of the shape using the one image having undergone the deconvolution processing and the other one of the first image and the second image. |
