发明名称 |
VAPOUR DEPOSITION METHOD FOR PREPARING AMORPHOUS LITHIUM-CONTAINING COMPOUNDS |
摘要 |
A vapour deposition method for preparing an amorphous lithium-containing oxide or oxynitride compound not containing phosphorous comprises providing a vapour source of each component element of the compound, including at least a source of lithium, a source of oxygen, a source of nitrogen in the case of an oxynitride compound, and a source or sources of one or more glass-forming elements; heating a substrate to substantially 180° C. or above; and co-depositing the component elements from the vapour sources onto the heated substrate wherein the component elements react on the substrate to form the amorphous compound. |
申请公布号 |
US2016340784(A1) |
申请公布日期 |
2016.11.24 |
申请号 |
US201515110638 |
申请日期 |
2015.01.07 |
申请人 |
ILIKA TECHNOLOGIES LIMITED ;TOYOTA MOTOR CORPORATION |
发明人 |
Hayden Brian Elliott;Smith Duncan Clifford Alan;Lee Christopher Edward;Anastasopoulos Alexandros;Yada Chihiro;Perkins Laura Mary;Laughman David Michael |
分类号 |
C23C16/505;C03C4/18;C23C16/452;H01M10/0562;C23C16/30;C23C16/40;C03C3/04;H01M10/0525 |
主分类号 |
C23C16/505 |
代理机构 |
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代理人 |
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主权项 |
1. A vapour deposition method for preparing an amorphous lithium-containing oxide or oxynitride compound not containing phosphorous, the method comprising:
providing a vapour source of each component element of the compound, wherein the vapour sources comprise at least a source of lithium, a source of oxygen, and a source or sources of one or more glass-forming elements; heating a substrate to substantially 180° C. or above; and co-depositing the component elements from the vapour sources onto the heated substrate wherein the component elements react on the substrate to form the amorphous compound. |
地址 |
Southampton Hampshire GB |