Verfahren zur Messung der Verteilung von Ladungsträgerteilchenstrahlen und dazu gehörigen Verfahren,申请号DE19996020827T-传众专利搜索

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发明名称	Verfahren zur Messung der Verteilung von Ladungsträgerteilchenstrahlen und dazu gehörigen Verfahren
摘要
申请公布号	DE69920827(T2)	申请公布日期	2005.02.24
申请号	DE19996020827T	申请日期	1999.07.21
申请人	NISSIN ELECTRIC CO., LTD.	发明人	IWASAWA, KOJI;NAGAI, NOBUO
分类号	G21K5/04;G01T1/29;H01J37/147;H01J37/317;(IPC1-7):H01J37/304;H01J37/305	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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