| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent efficiency decline caused by capacity interference at an excitation time of an oscillator, and to improve efficiency by improving a conductivity of a connection layer. <P>SOLUTION: On a flat substrate, a detection means for detecting the movement of two oscillators 2a in a measuring direction Oy perpendicular to an excitation direction Ox is surrounded by an excitation frame 6a associated with each oscillator 2a, and is equipped with a detection element 8a equipped with a plurality of mobile electrodes 10a, and first and second sets of fixed electrodes 11, 12. Each mobile electrode 10a is disposed between the fixed electrodes 11, 12 associated with the first and second sets to form two variable differential capacitors. The fixed electrodes 11, 12 of each set are interconnected by means of interconnection bars 13, 14 made of electrically conducting material extending above the fixed electrodes 11, 12 in a plane substantially parallel to the substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT |
