| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chamber apparatus in which a light beam from a scanning optical system is guided into a vacuum chamber and a sample is scanned with the light beam while extraneous light from outside a vacuum chamber is blocked. SOLUTION: The vacuum chamber apparatus includes: a vacuum sample stage portion disposed in the vacuum chamber, used to place a sample thereon, and movable in an optional direction; a scanning optical system disposed outside the vacuum chamber, used to emit and deflect a scanning beam for scanning a sample; an extraneous light blocking means connecting the vacuum chamber and scanning optical system together, and used to block extraneous light entering the vacuum chamber; an internal observation means disposed in the connection portion of the vacuum chamber and extraneous light blocking means, and capable of transmitting the scanning beam; and a scanning beam folding means with which the scanning beam emitted from the scanning optical system is guided to the inside of the vacuum chamber via the extraneous light blocking means and internal observation means. COPYRIGHT: (C)2008,JPO&INPIT
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