Exposure apparatus and device manufacturing method

摘要

An exposure apparatus includes a measuring member disposed in a substrate stage for holding the substrate, at a side of a surface holding the substrate of a substrate stage, an auxiliary member disposed at a side of the surface of the substrate stage, with a gap with the measuring member, and a sealing member contacting a surface of the auxiliary member, disposed to cover the gap, and for suppressing penetration of the liquid locating on a surface of the measuring member, or the surface of the auxiliary member into the gap, and wherein the sealing member has a shape forming a space where a part of the surface of the measuring member contacts gas, while the liquid is on the surface of the measuring member and the liquid contacts an edge of the sealing member.

主权项

1. An exposure apparatus that exposes a substrate while liquid is filled between a projection optical system and the substrate, the exposure apparatus comprising:
a measuring member disposed in a substrate stage for holding the substrate, at a side of a surface holding the substrate of the substrate stage; an auxiliary member disposed at a side of the surface of the substrate stage, with a gap between the auxiliary member and the measuring member; and a sealing member contacting a surface of the auxiliary member, disposed to cover the gap, and for suppressing penetration of the liquid located on a surface of the measuring member or the surface of the auxiliary member into the gap, wherein the sealing member includes a fixing member adhered to the surface of the auxiliary member, and a shape at an edge of the sealing member in a measuring member side forms a space that contacts a part of the fixing member and the liquid with gas, while the liquid is on the surface of the measuring member and the liquid contacts the edge.